Cathodic Arc Synthesis of Ti-Si-C-N Thin Films from Ternary Cathodes

Cathodic Arc Synthesis of Ti-Si-C-N Thin Films Plasma Analysis and Microstructure Formation

ii The cover image is based on a photograph of arc spots moving on the surface of a Ti cathode, taken during the first experimental session in our new PVD research system, Hydra. The explosive plasma generation in the arc spots is central to the cathodic arc deposition technique, studied and used extensively for synthesis in the Thesis. Abstract This Thesis explores the arc deposition process a...

Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions

Structural characteristics and tribological properties of TiAlCr(Si)CN nanocomposite films coated on the SPK 1.2080 tool steel using PVD technique

In the present work, structural characteristics and tribological properties of the Ti-Al-Cr-(Si)-C-N nanocomposite films coated on the SPK 1.2080 tool steel byPVD technique have been investigated. The PVD coating process was carried out using Ti (Si) Al and CrAl cathodes at 150 A current, 40 V bias and (Ar)0.1(CH4)0.45(N2)0.45 gas mixture for 50 min. Evaluations were conducted by OM, FESEM, AFM...

Characterization of TiN, CrN and (Ti, Cr) N Coatings Deposited by Cathodic ARC Evaporation

In this investigation PVD Ti-Cr)N coatings were deposited on hardened and tempered tool steel substrates using reactive arc evaporation. Physical and mechanical properties of coatings such as roughness, thickness, phase composition, hardness and modulus young and coefficient friction were evaluated. Phase compositions were studies by X-ray diffraction method. The surface microstructure and morp...

Microstructure evolution of Ti3SiC2 compound cathodes during reactive cathodic arc evaporation

The microstructure evolution and compositional variation of Ti3SiC2 cathode surfaces during reactive cathodic arc evaporation are presented for different process conditions. The results show that phase decomposition takes place in the near-surface region, resulting in a 5–50 m thick converted layer that is affected by the presence of nitrogen in the deposition chamber. This layer consists of tw...